Verifire

Interferometer by Zygo Corporation

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The Verifire from Zygo Corporation is a 1.44 Megapixel Fizeau Interferometer that has a camera resolution of 1200 x 1200 pixels. It operates at a wavelength of 633 nm and delivers an output power above 3 mW. This interferometer produces a test beam of diameter 4" (102 mm) or 6" (152 mm) and has an optical center line of 4.25" (108 mm). It has a frame rate of 160 Hz and digitization of 8-bit. This interferometer has an acquisition time of 81 ms - 188 ms and a pupil focus range of ± 2.5 m (for 4") & ± 5.5 m (for 6"). It has an optical zoom of 1 - 5 x and alignment field of view (FOV) of ± 3 deg (for 4") & ± 2 deg (for 6"). This circularly polarized interferometer features patented QPSITM acquisition algorithms and full-featured MxTM metrology software.

The Verifire has 3 data acquisition modes: PSI - temporal phase-shifting interferometry, QPSI - vibration robust temporal phase-shifting interferometry, and an optional DynaPhase - vibration insensitive instantaneous interferometry. This class 3a interferometer can be controlled via a high-performance Windows 10 64-bit Dell PC and has horizontal or vertical mounting configurations. It has a Quick Fringe Acquisition System (QFAS) with a twin spot reticle and requires an AC supply voltage of 100 V - 240 V. This interferometer is available in a package that measures 69 (L) cm x 31 (W) cm x 34 (H) cm (for 4") or 92 (L) cm x 31 (W) cm x 34 (H) cm (for 6") and is ideal for reflective optics, transparent optics & imaging system applications.

Product Specifications

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Product Details

  • Part Number
    Verifire
  • Manufacturer
    Zygo Corporation
  • Description
    1.44 Megapixel Fizeau Interferometer for Imaging System Applications

General Parameters

  • Type
    Fizeau Interferometer
  • Wavelength
    633 nm
  • Beam Diameter
    4 to 6 inch
  • Output Power
    3 mW
  • Magnification
    1-5X encoded continuous (1-50x digital)
  • Resolution
    1200 (H) x 1200 (V)
  • Dimensions
    69 x 31 x 34 cm, 92 x 31 x 34 cm
  • Focus Range
    ± 2.5 m, ± 5.5 m
  • Laser Source
    High power stabilized HeNe
  • Power Supply
    100 to 240 VAC, 50/60 Hz
  • Weight
    38 kg, 45 kg

Connections & Interface

  • Interface
    Software

Environmental Conditions

  • Operating Temperature
    15 to 30 Degree C

Applications

  • Applications
    Surface Measurement

Technical Documents

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